Preventive Maintenance FE SEM R8220 HITACHI
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Maintenance :
- Check of Rotary Pump Oil Volume
- Check of Filter Regulator
- Replacement of Rotary Pump Oil
- Replacement of Oil Mistrap of Rotary Pump
- Maintenance of Dry Pump
- Re-alignment
- Including baking Process
- Check Vacuum System
- Check Software and Function
- Check EDX
- 2 x preventive maintenance dalam 1 tahun
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